7 results
Novel Applications of Rapid Photothermal Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 339
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- 1998
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Role of rapid photothermal processing in environmentally conscious semiconductor manufacturing
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- Journal:
- Journal of Materials Research / Volume 13 / Issue 1 / January 1998
- Published online by Cambridge University Press:
- 31 January 2011, pp. 61-67
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- January 1998
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Growth And Characterization of Thin Wet Oxides Grown by Rapid Thermal Processing
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- MRS Online Proceedings Library Archive / Volume 525 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 143
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- 1998
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Chemical Vapor Deposited Teflon Amorphous Fluoropolymer as an Interlevel Dielectric Material for Low Power Integrated Circuits
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- MRS Online Proceedings Library Archive / Volume 476 / 1997
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- 15 February 2011, 207
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- 1997
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How Rapid Isothermal Processing Can be a Dominant Semiconductor Processing Technology in the 21st Century
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- MRS Online Proceedings Library Archive / Volume 429 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 81
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- 1996
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Low Thermal Budget Processing Of Organic Dielectrics
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- Journal:
- MRS Online Proceedings Library Archive / Volume 381 / 1995
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- 15 February 2011, 117
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- 1995
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Deposition of Oxide Based Advanced Electronic and Optical Materials by Rapid Isothermal Processing (RIP) Assisted Metalorganic Chemical Vapor Deposition (MOCVD)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 201
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- 1994
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